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Fabrication and characterization of
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C. Process parameters
Contents
List of Figures
1.1.
Comparison between long, middle and short range technologies.
1.2.
Atmospheric attenuation versus millimeter wavelengths.
2.1.
Current oscillations in a GaAs sample (J. B. Gunn)
2.2.
Crystallographic directions in a zinc-blende crystal.
2.3.
Simplified band structures of zinc-blende (cubic) GaAs, InP and GaN.
2.4.
Schematic view of the average electron drift velocity as a function of the electric field E for GaAs, InP and GaN.
2.5.
Generation of a stable dipole domain.
.
Illustration of the equal area relationship between
and
.
2.7.
Domain profile in the limit condition of zero diffusion.
2.8.
The relationship between the domain voltage and the electric field outside the domain imposed by the space charge dynamics.
2.9.
Energy-band diagrams for Schottky contact on n-semiconductor.
2.10.
Principle schema of a Gunn diode with a graded AlGaAs injector.
2.11.
DC electrical model of a graded gap injector Gunn diode.
2.12.
Functional principles of an RTD
2.13.
Transport process in a resonant tunneling diode
2.14.
General two-port network
2.15.
Current and voltage characteristics for the Transit Time mode
2.16.
Current and voltage characteristics for the Delayed Domain mode
2.17.
Current and voltage characteristics for the Quenched Domain mode.
2.18.
Representation of the different operating modes of a Gunn diode.
2.19.
Approximation of the device geometry to simplify the heat transfer problem
2.20.
Heat-sink temperature profile for a standard Gunn diode chip.
2.21.
Double-sided heat-sink temperature profile for a quasi-planar Gunn diode.
2.22.
Heat flux profile for a standard Gunn diode chip.
2.23.
Heat-flux profile for a quasi-planar Gunn diode.
3.1.
Semiconductor bandgaps and lattice parameters
3.2.
Bandgap energies of
vs. the Al concentration.
3.3.
Bandgaps of III-N semiconductors with wurtzite and zincoblende structure versus their lattice parameter
3.4.
Schematic view of a MBE system.
3.5.
Typical layer sequence of the GaAs Gunn diode with a graded gap injector.
3.6.
Conduction band profile and local density of states plot for a Resonant Tunnelling Injector
3.7.
Typical layer sequence of the GaAs Gunn diode with a resonant tunneling injector.
3.8.
HRTEM image of a resonant tunneling double barrier.
3.9.
Layer sequence of the GaN Gunn diode.
3.10.
AFM image of the surface morphology for GaN Gunn structure
4.1.
Operation principle of the AFM.
4.2.
Errors in AFM characterization.
4.3.
Hall measurement conventions.
4.4.
Hall measurement contact configurations and layouts
4.5.
Contact resistance test patterns. (a) TLM and (b) CLM configuration.
4.6.
Evaluation of the contact and sheet resistances for TLM measurements.
4.7.
Schematic view of the pulse measurement setup.
4.8.
Vector network analyzer HP8510C (8510XF)
4.9.
Smith Chart
5.1.
SEM pictures of the GaAs Gunn diode mesas after ECR-RIE etching
5.2.
SEM pictures of the GaN Gunn diode mesas after ECR-RIE etching
5.3.
SEM pictures of the GaN nanocolumns (topdown approach)
5.4.
SEM picture of the GaAs Gunn diode ohmic contacts.
5.5.
SEM picture of the GaAs Gunn diode after the isolation step.
5.6.
Schematic view of the planarization with polyimide.
5.7.
Optical microscope picture and schematic view of the bond-pads deposition after the polyimide planarization.
5.8.
SEM pictures of the finished GaAs Gunn diode with coplanar pads.
5.9.
SEM pictures of the monolithic integrated GaAs Gunn diode oscillators.
5.10.
Air-bridge fabrication using gold plating process.
5.11.
SEM pictures of the gold airbridges on GaAs Gunn diodes.
6.1.
Graphic analysis of the transmission line measurement
6.2.
I-V characteristics of a graded gap injector Gunn diode
6.3.
I-V characteristics of diodes with different Al maximum concentration in the graded barrier.
6.4.
I-V characteristics of a graded gap injector Gunn diode for different temperatures
6.5.
Graphical procedure to obtain the barrier height
, the effective Richardson constant
and the saturation current Is.
6.6.
The graded gap barrier height as function of the saturation current
for different graded gap injectors.
6.7.
I-V characteristics of a typical resonant tunneling injector Gunn diode.
6.8.
I-V characteristics of a typical GaN Gunn diode.
6.9.
100ns pulses I-V characteristics of a graded gap injector Gunn diode
.
Impedance analysis up to
of a Gunn diode without injector.
.
Impedance analysis up to
of a graded gap injector Gunn diode
6.12.
Admittance vs. frequency for a GaAs Gunn diode without injector
6.13.
Admittance vs. frequency for a graded gap injector GaAs Gunn diode.
6.14.
Admittance vs. frequency for a resonant tunneling injector GaAs Gunn diode.
6.15.
Drift velocity vs. bias voltage for a Gunn diode without injector.
6.16.
Drift velocity vs. bias voltage for graded gap Gunn diodes with different maximum Al concentration.
6.17.
-valley occupation vs. electric field for a graded gap injector GaAs Gunn diode
6.18.
Drift velocity vs. bias voltage for different temperatures.
6.19.
Cross sectional view of a typical Gunn diode cavity oscillator.
6.20.
Frequency and output power, vs. voltages for a graded gap injector Gunn diode second harmonic cavity oscillator.
6.21.
Schematic view and equivalent circuit of an unit cell of the periodic low pass filter.
6.22.
Simulated and measured response of the three cell, periodic low-pass filter. The unit cell length is 0.8mm.
6.23.
Effect of additional cells on the low-pass filter roll-off. Simulated insertion loss of two and three cell. The unit cell length is 1 mm.
6.24.
Typical Gunn diode MMIC voltage controlled oscillator layout.
.
Admittance vs. frequency for the
resonant circuit.
.
Admittance vs. frequency for the
resonant circuit.
6.27.
Frequency and output power vs. voltage for a graded gap injector Gunn diode monolithic oscillator (type I).
6.28.
Frequency and output power vs. voltage for a graded gap injector Gunn diode monolithic oscillator (type II).
simone montanari 2005-08-02